EFEM_Shanghai Sharetek Technology Co.,ltd.

Products

Equipment and production line

Process Equipment Test Automation Solution Assembly Automation Solution Accessory Equipment

Software system

Sharetek MOM/MES Sharetek WMS Sharetek IoT Sharetek EAP Sharetek FMB Sharetek IDP Sharetek APS Sharetek RTD Sharetek TDM

EFEM

Automatic wafer loading and unloading via loadport.
Precise inspection of wafer shape and position with Aligner.
Interfaces with standard equipment such as wafer AOI and ball implanters.
Storage environment compliance through FFU

Equipment Features

• Automatic wafer loading and unloading, position

inspection and other functions

• The equipment can interact with the whole factory

system for data, product status can be viewed in real

time, data traceability

• Connectable to standard communication interfaces

• High cleanliness grade

Applicable Products

8", 12" wafers

Technical Specifications
Dimension(L×W×H)	1700mmx1300mmx2100mm
Weight	1000KG
UPH	≥125pcs
Repetition accuracy	≤±0.05mm
Ceanliness grade	Class 10
Operating voltage / Power	220V / 7.5KW

The product pictures and technical specifications are for reference only, Sharetek reserves the final explanation right of them.

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