time:2024-02-20 browse:1
• Field proven semiconductor EAP solution that support function:
• Automatic MES transaction
• Equipment processing state and alarm monitoring
• Recipe management and parameter control
• Carrier tracking
• Material tracking
• Parameter tracking
• Based on open source technology
• Support various SEMI Standard E4/E5/E10/E37
• Cross-platform design, support ARM/X86, Linux/Windows/Mac
• Field proven solution
• Providing SECSServer to convert non-SECS /GEM standard equipment into SECS/GEM equipment, and customers only need to focus on SECS/GEM development